In general, sputtering target mainly consists of target blanks, backing plates and other parts of the composition, in which the target blank is a high-speed ion beam stream bombardment of the target material, belonging to the core part of the sputtering target, in the sputtering coating process, target blanks by the ion impact, the surface of the atom sputtering dispersed and deposited on the substrate made of electronic film.
According to the type can be divided into:
Metal sputtering targets
Alloy sputtering target
Oxide sputtering targets
Evaporation materials
According to the application field can be divided into:
Semiconductor chip target
Flat display target
Solar cell target
Information storage target
Tool modification target
Electronic device target and other targets